Innovative production technology by multi-wire electrical discharge slicing

Objectives and action

 For sustainable development of society,  energy supply and global warming are very important issues, and a low carbon society is required. Efficient consumption of For this purpose, electrical energy are indispensable, and SiC (silicon carbide) is useful material for high efficient devices. However, SiC is hard and brittle materials, and its productivity of wafers from ingots is low. Therefore, eco-friendly multi-wire electrical discharge slicing has been developed by using only deionized water as working fluid, and high efficient slicing can be expected by decreasing the diameter of wire. New group power supplying method can satisfy both efficient power supplying and machinability, which can contribute innovative production technology of SiC wafer to improve its productivity and quality by considering important elements for industrial use.

Future plan

 Proper detection of electrical discharge and closed-loop control are important to apply innovative group power supplying method to the industry. We realize innovative technologies for future digital production by developing this control method.


 

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